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言語種別	英語
発行・発表の年月	2014/10
形態種別	国際会議論文
査読	査読あり
標題	A 60-GHz Efficiency-Enhanced On-Chip Dipole Antenna Using Helium-3 Ion Implantation Process
執筆形態	共著
掲載誌名	IEEE MTT-S European Microwave Conference
掲載区分	国内
概要	A 60-GHz CMOS on-chip dipole antenna with efficiency-enhancement techniqueis presented. A helium-3 ion irradiation process is used to reducethe substrate losses of the on-chip antenna. The radiation efficiency of the antenna is doubled using the ion implantation technique. The antenna is fabricated in a 65-nm CMOS technology with a core area of 0.48mm2. The on-chip antenna achieves a peak gain of -4.1 dBi at 60GHz and a gain fluctuation of around ±1dB from 57 GHz to 67GHz. 副筆