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言語種別	英語
発行・発表の年月	2017/10
形態種別	国際会議論文
標題	Gain Measurement of 60 GHz CMOS On-Chip Dipole Antenna By Proton Irradiation
執筆形態	共著
掲載誌名	Proc. of International Symposium on Antennas and Propagation
掲載区分	国内
概要	In this paper, a 60 GHz CMOS on-chip dipole antenna with loss-reduced silicon substrate, which had been proposed and simulated by the authors, was measured and gain improvement of approximately 9 dB wasobtained. In the antenna, rectangularregion with 500 μm × 1000 μm around the dipole is irradiated by proton and conductivity is reduced from 10 S/m (10 Ω cm) to 0.1 S/m (1 kΩ cm). Antenna gain of -4 dBi could be achieved. 副筆