1.
|
|
論文
|
*
|
2.
|
2013
|
論文
|
Adsorption of indole on KOH-activated mesoporous carbon Colloids and Surfaces A,424,pp.89-95 (共著)
|
3.
|
2013
|
論文
|
Pore size control of microporous carbon membranes by post-synthesis activation and their use in a membrane reactor for dehydrogenation of methylcyclohexane J. Membr. Sci. 440,pp.134-139 (共著)
|
4.
|
2013
|
論文
|
Synthesis of mesoporous ZnO, AZO, and BZO transparent conducting films using nonionic triblock copolymer as template Mat. Lett. 100,pp.111-114 (共著)
|
5.
|
2012
|
論文
|
Coke deposition in the SAPO-34 membranes for examining the effects of zeolitic and non-zeolitic pathways on the permeation and separation properties in gas and vapor permeations J. Membr. Sci. 415-416,pp.176-180 (共著)
|
6.
|
2012
|
論文
|
Effect of Crystal Size on Acetone Conversion over SAPO-34 Crystals Catal Lett 142,464-468頁 (共著)
|
7.
|
2012
|
論文
|
Low-temperature hydrothermal synthesis of ZnO nanosheet using organic/inorganic composite as seed layer Mat. Lett. 86,pp.65-68 (共著)
|
8.
|
2012
|
論文
|
Low-temperature synthesis of ZnO nanorods using organic-inorganic composite as seed layer Thin Solid Films 520,pp.4291-4296 (共著)
|
9.
|
2011
|
著書
|
沙漠を森に ―温暖化への処方箋― (共著)
|
10.
|
2011
|
論文
|
Effect of surface area of ultramicro-, micro- and mesopores on the electric double-layer capacitance property of ordered mesoporous carbons J. Chem. Eng. Jpn. 44,pp.518-523 (共著)
|
11.
|
2011
|
論文
|
Effects of Water Supply on the Growth Rate and Water Use Efficiency of Trees in Arid Land Afforestation in Western Australia J. Chem. Eng. Jpn. 44,pp.788-797 (共著)
|
12.
|
2011
|
論文
|
Phase control of ordered mesoporous carbon synthesized by a soft-templating method Colloids and Surfaces A,384,pp.58-61 (共著)
|
13.
|
2011
|
論文
|
Synthesis of MCM-22 zeolite membranes and vapor permeation of water/acetic acid mixtures J. Membr. Sci. 372,pp.269-276 (共著)
|
14.
|
2010
|
著書
|
魅力ある授業のために2 ―双方向型授業の取り組みを中心に― (共著)
|
15.
|
2010
|
論文
|
Dry gel conversion synthesis of SAPO-34 nanocrystals Mater. Chem. Phys. 123,pp.507-509 (共著)
|
16.
|
2010
|
論文
|
Gas permeation and pervaporation of water/alcohols through the microporous carbon membranes prepared from resorcinol/formaldehyde/quaternary ammonium compounds Sep. Purif. Tech. 73,pp.2-7 (共著)
|
17.
|
2010
|
論文
|
High propylene selectivity in methanol-to-olefin reaction over H-ZSM-5 catalyst treated with phosphoric acid J. Jpn. Petrol. Inst. 53,pp.232-238 (共著)
|
18.
|
2010
|
論文
|
KOH activation of ordered mesoporous carbons prepared by a soft-templating method and their enhanced electrochemical properties Carbon 48,pp.1985-1989 (共著)
|
19.
|
2010
|
論文
|
Low temperature synthesis of ZnO nanorods using a seed layer of zinc acetate/sodium dodecyle sulfate nanocomposite Mater. Lett. 64,pp.513-515 (共著)
|
20.
|
2010
|
その他
|
特集「化学工学年鑑2010」11.2 地球環境問題 化学工学 74(10),593-594頁 (単著)
|
21.
|
2009
|
著書
|
沙漠の事典 (共著)
|
22.
|
2009
|
論文
|
Estimation of Climate Change Effects on Arid Land Afforestation Technologies for CO2 Sequestration J. Arid Land Studies(2009) 19,41-43頁 (共著)
|
23.
|
2009
|
論文
|
Experiment on Sprout Regeneration for Dryland Afforestation Journal of Ecotechnology Research 14,pp.179-182 (共著)
|
24.
|
2009
|
論文
|
Morphology control of silicalite/HZSM-5 composite catalysts for the formation of para-xylene Catalysis Letters 127,pp.233-238 (共著)
|
25.
|
2009
|
論文
|
Nitrogen-containing microporous carbons prepared from anionic surfactant-melamine/formaldehyde composites Carbon 47,pp.2138-2141 (共著)
|
26.
|
2009
|
論文
|
Ordered mesoporous carbon films prepared from 1,5-dihydroxynaphthalene/triblock copolymer composites Carbon 47,pp.2531-2533 (共著)
|
27.
|
2009
|
論文
|
Pore structure and pore size controls of ordered mesoporous carbons prepared from resorcinol/formaldehyde/triblock polymers Micropor. Mesopor. Mater. 118,pp.218-223 (共著)
|
28.
|
2009
|
論文
|
Size control of SAPO-34 crystals and their catalyst lifetime in the methanol-to-olefin reaction Appl. Catal. A 362,pp.193-199 (共著)
|
29.
|
2009
|
論文
|
Transmission electron microscopy study on the growth of zinc oxide crystals under hydrothermal conditions Mater. Lett. 63,pp.2373-2376 (共著)
|
30.
|
2009
|
論文
|
Vapor phase synthesis of ultrathin carbon films with a mesoporous monolayer by a soft-templating method Chem. Commun. 2009,pp.1371-1373 (共著)
|
31.
|
2009
|
論文
|
Woody Biomass Production by Utilizing Coppice of Eucalyptus camaldulensis in an Arid Area in Western Australia J. Arid Land Studies 19,pp.53-56 (共著)
|
32.
|
2009
|
その他
|
特集「化学工学年鑑2009」11.2 地球環境問題, 化学工学 73(10),527-528頁 (単著)
|
33.
|
2008
|
著書
|
水学への誘い (共著)
|
34.
|
2008
|
論文
|
Basic amino acid-assisted synthesis of resorcinol- formaldehyde polymer and carbon nanospheres Ind. Eng. Chem. Res. 47,pp.4712-4718 (共著)
|
35.
|
2008
|
論文
|
Catalytic activities and structures of silicalite-1/HZSM-5 zeolite composites Micropor. Mesopor. Mater. 115,pp.106-112 (共著)
|
36.
|
2008
|
論文
|
Disordered mesoporous Silica Low-k Thin Films Prepared by Vapor Deposition into a Triblock Copolymer Template Film Thin Solid Films 516,pp.4771-4776 (共著)
|
37.
|
2008
|
論文
|
Highly permeable mesoporous silica membranes synthesized by vapor infiltration of tetraethoxysilane into non-ionic alkyl poly(oxyethylene) surfactant films J. Membr. Sci. 325,pp.698-703 (共著)
|
38.
|
2008
|
論文
|
Low-index mesoporous silica films modified with trimethylethoxysilane Colloids and Surfaces A 318,pp.84-87 (共著)
|
39.
|
2008
|
論文
|
Proton-conducting mesoporous silica/phosphate composite films prepared by vapor phase method Electrochemical and Solid-State Letters 11,pp.B6-B9 (共著)
|
40.
|
2008
|
論文
|
Synthesis of 3D pore mesostructured silica films by vapor infiltration of tetraethoxysilane J. Colloid Interface Sci. 328,pp.120-123 (共著)
|
41.
|
2008
|
論文
|
Vapor phase synthesis of mesoporous silica thin films with a 3D pore structure Stud. Surf. Sci. Catal. 174A,pp.417-420 (共著)
|
42.
|
2007
|
論文
|
H2-selective carbon membranes prepared from furfuryl alcohol by vapor phase synthesis Ind. Eng. Chem. Res. 46,pp.4040-4044 (共著)
|
43.
|
2007
|
論文
|
Hydrogen-permeable membranes composed of zeolite nano-blocks J. Membr. Sci. 306,pp.349-354 (共著)
|
44.
|
2007
|
論文
|
Kinetic modeling of tungsten silicide chemical vapor deposition from WF6 and Si2H6: Determination of the reaction scheme and the gas-phase reaction rates Chem. Eng. Sci. 62,pp.6403-6411 (共著)
|
45.
|
2007
|
論文
|
Study on adsorption and desorption mechanisms at the interface on the basis of experimental data of bubble coalescence time J. Chem. Eng. Japan 40,pp.173-177 (共著)
|
46.
|
2007
|
論文
|
Vapor phase synthesis of mesoporous SiO2-P2O5 thin films Langmuir 23,pp.4746-4748 (共著)
|
47.
|
2007
|
論文
|
Vapor phase synthesis of ordered mesoporous silica-phosphate complex films and their proton conductivity Stud. Surf. Sci. Catal. 170,pp.1912-1917 (共著)
|
48.
|
2006
|
論文
|
Application of Test-Driven Development Framework for Environmental Software: A Case Study in Long-Term Photosynthetic Process Simulation Proceedings of the iEMSs Third Biennial Meeting July(2006) (共著)
|
49.
|
2006
|
論文
|
Development of tree growth simulator based on a process model of photosynthesis for Eucalyptus camaldulensis in arid land Journal of Arid Land Studies(2006) 15,263-266頁 (共著)
|
50.
|
2006
|
論文
|
Kinetic study of chemical vapor deposition of WSix films from WF6 and SiH2Cl2: Determination of molecular size and reactivity of gas species Thin Solid Films 513,pp.36-42 (共著)
|
51.
|
2006
|
論文
|
Kinetics of chemical vapor deposition of WSix films from WF6 and SiH2Cl2: Effect of added H2, SiH4, and Si2H6 Microelectronic Engineering 83,pp.1994-2000 (共著)
|
52.
|
2006
|
論文
|
Selective CO oxidation over carbon-coated Pt/SiO2-TiO2 particles Appl. Catal. A 308,pp.210-215 (共著)
|
53.
|
2006
|
論文
|
Selective formation of p-xylene over single crystal-like zeolite composite Stud. Surf. Sci. Catal. 162,pp.275-281 (共著)
|
54.
|
2006
|
論文
|
Selective formation of para-Xylene over H-ZSM-5 coated with polycrystalline silicalite crystals J. Catal. 243,pp.389-394 (共著)
|
55.
|
2006
|
論文
|
Surfactant-mediated synthesis of Pt nanoparticles/nanoporous carbons composite Stud. Surf. Sci. Catal. 162,pp.561-567 (共著)
|
56.
|
2006
|
論文
|
Synthesis of ordered mesoporous zirconium phosphate films by spin coating and vapor treatments Langmuir 22,pp.9469-9472 (共著)
|
57.
|
2006
|
論文
|
Tertiary amine-mediated synthesis of microporous carbon membranes J. Membr. Sci. 280,pp.603-609 (共著)
|
58.
|
2006
|
論文
|
Vapor infiltration techniques for spin-on mesoporous silica films Thin Solid Films 495,pp.186-190 (共著)
|
59.
|
2006
|
論文
|
界面活性剤を用いたミクロおよびメソポーラスカーボンの細孔制御 炭素素原料科学と材料設計 Ⅷ,112-121頁 (共著)
|
60.
|
2006
|
論文
|
乾燥地域における焼成ボーキサイトの土壌改良材としての利用 沙漠研究 16,31-38頁 (共著)
|
61.
|
2006
|
その他
|
TOPICS 好気状態における陸上植物からのメタン排出 化学工学 70(6),308-309頁 (単著)
|
62.
|
2006
|
その他
|
金属ナノ粒子/ミクロ孔炭素複合体の合成 ケミカルエンジニアリング 51,125-129頁 (共著)
|
63.
|
2006
|
その他
|
有機鋳型を用いたポーラスカーボン材料の合成法の開発 ケミカルエンジニアリング 51(8),602-607頁 (共著)
|
64.
|
2005
|
論文
|
Microporous carbons prepared from cationic surfactant-resorcinol/ formaldehyde composites Carbon 43,pp.269-274 (共著)
|
65.
|
2005
|
論文
|
化学工学系2回生へのPBL教育に対するアウトカムズの持続的評価 工学教育 53-6,52-57頁 (共著)
|
66.
|
2005
|
論文
|
乾燥地植林による炭素固定システム構築 ―土壌構造改良による炭素固定促進― エネルギー資源(2005) 26,435-441頁 (共著)
|
67.
|
2005
|
その他
|
メソポーラスシリカ薄膜の蒸気合成 ゼオライト(Zeolite News Letters) 22,36-42頁 (共著)
|
68.
|
2004
|
論文
|
Corporation of organic groups within the channel wall of spin-on mesostructured silica films by a vapor infiltration technique Langmuir 20,pp.3780-3784 (共著)
|
69.
|
2004
|
論文
|
Nano-Architectural Silica Thin Films with Two-Dimensionally Connected Cage-Like Pores Synthesized from Vapor Phase J. Am. Chem. Soc. 126,pp.4854-4858 (共著)
|
70.
|
2004
|
論文
|
Reactant selective hydrogenation over composite silicalite-1-coated Pt/TiO2 particles Ind. Eng. Chem. Res. 43,pp.1211-1215 (共著)
|
71.
|
2004
|
論文
|
Synthesis of Partially Carbonized Polyimide Membranes with High Resistance to Moisture J. Chem. Eng. Japan 37,pp.1092-1098 (共著)
|
72.
|
2004
|
論文
|
Ultrathin Silica Films with Nanoporous Monolayer Chem. Lett. 33,pp.1408-1409 (共著)
|
73.
|
2003
|
論文
|
Comparative analysis between biomass and topographic features in an arid land, western Australia J. Chem. Eng. Japan 36,pp.376-382 (共著)
|
74.
|
2003
|
論文
|
Development of Integrated Simulator of Water Transport and Plant Growth as an Evaluation Tool of Arid Land Afforestation for CO2 Fixation J. Chem. Eng. Japan(2003) 36,383-390頁 (共著)
|
75.
|
2003
|
論文
|
Improved thermal stability of mesoporous molecular sieves by vapor infiltration treatment Micropor. Mesopor. Mater. 63,pp.105-112 (共著)
|
76.
|
2003
|
論文
|
Ordered Mesoporous Silica Films Synthesized from Vapor Phase Mat. Res. Soc. Symp. Proc. 755,pp.41-46 (共著)
|
77.
|
2003
|
論文
|
Partially carbonized polyimide membranes with high permeability for air separation J. Chem. Eng. Japan 36,pp.603-608 (共著)
|
78.
|
2003
|
論文
|
Pore size distributions of silylated mesoporous silica MCM-48 membranes Sep. Purif. Technol. 32,pp.127-132 (共著)
|
79.
|
2003
|
論文
|
Restructuring and afforestation of hardpan area to sequester carbon J. Chem. Eng. Japan(2003) 36,328-332頁 (共著)
|
80.
|
2003
|
論文
|
Separation of Organic/water Mixtures with Silylated MCM-48 Silica Membranes Micropor. Mesopor. Mater. 66,pp.69-76 (共著)
|
81.
|
2003
|
論文
|
Synthesis of zirconium-containing mesoporous silica Zr-MCM-48 membranes with high alkaline resistance for nanofiltration Stud. Surf. Sci. Catal. 146,pp.327-333 (共著)
|
82.
|
2003
|
論文
|
Vapor Phase Synthesis of Mesoporous Silica Thin Films Chem. Mater. 15,pp.1006-1011 (共著)
|
83.
|
2003
|
論文
|
Vapor Treatment of Spin-On Mesostructured Films for the Enhancement of Structural Stability Mat. Res. Soc. Symp. Proc. 755,pp.35-40 (共著)
|
84.
|
2003
|
論文
|
Water use efficiency of Eucalyptus camaldulensis growing in arid regions in western Australia J. Chem. Eng. Japan 36,pp.391-400 (共著)
|
85.
|
2003
|
論文
|
Zirconium-containing mesoporous silica Zr-MCM-48 for alkali resistant filtration membranes J. Membr. Sci. 218,pp.165-171 (共著)
|
86.
|
2003
|
その他
|
半導体層間絶縁膜としての周期構造ポーラスシリカ膜の合成 膜(MEMBRANE) 28,177-184頁 (共著)
|
87.
|
2002
|
論文
|
Enhancement of Structural Stability of Mesoporous Silica Thin Films Prepared by Spin Coating Chem. Mater. 14,pp.4229-4234 (共著)
|
88.
|
2002
|
論文
|
Synthesis of Ordered Nanoporous Silica Film with High Structural Stability Mat. Res. Soc. Symp. Proc. 716,pp.247-252 (共著)
|
89.
|
2001
|
論文
|
A mesoporous silica (MCM-48) membrane: preparation and characterization J. Memb. Sci. 182,pp.235-244 (共著)
|
90.
|
2001
|
論文
|
Enhancement of Hydrothermal Stability and Hydrophobicity of a Silica MCM-48 Membrane by Silylation Ind. Eng. Chem. Res. 40,pp.105-6110 (共著)
|
91.
|
2001
|
論文
|
Permeation of Hexane Isomers through an MFI Membrane Ind. Eng. Chem. Res., 39,pp.434-2438 (共著)
|
92.
|
2001
|
論文
|
Propagation of Cigarette Static Burn Beitr. Tabakforsch. Int(2001) 19,277-287頁 (共著)
|
93.
|
2001
|
論文
|
Zeolite membrane on catalyst particles for selective formation of p-xylene in the disproportionation of toluene Chem.Commun. 2001,pp.1746-1747 (共著)
|
94.
|
2001
|
論文
|
Zirconium-Containing Mesoporous Silica with High Alkaline Resistance J.Chem.Eng.Jpn. 34,pp.1321-1324 (共著)
|
95.
|
2000
|
論文
|
Kinetic Study of CVD Reaction by Area-Controlled CVD J.Chem.Eng.Jpn. 33,pp.32-40 (共著)
|
96.
|
2000
|
論文
|
Numerical Prediction of Water Movement in Western Australian Soil for Large Scale Afforestation Jounal of Arid Land Studies 10S,pp.25-28 (共著)
|
97.
|
2000
|
論文
|
3次元コンピュータシミュレーションを利用したCVD装置設計 -ガスアウトレットの効果- 化学工学論文集 第26巻(第6号),758-762頁 (共著)
|
98.
|
2000
|
論文
|
概要設計を目的とした基板加熱型CVD反応器のモデル化 化学工学論文集 第26巻(第6号),798-803頁 (共著)
|
99.
|
2000
|
論文
|
豪州乾燥地の土壌中浸潤シミュレーション 化学工学論文集 第26巻(第4号),581-587頁 (共著)
|
100.
|
1999
|
論文
|
Area-Controlled CVD using Catalytic Reaction J.Chem.Eng.Jpn. 32,pp.268-273 (共著)
|
101.
|
1999
|
論文
|
Chemical reaction engineering in the design of CVD reactors Chem. Eng. Sci. 54,pp.1941-1957 (共著)
|
102.
|
1999
|
論文
|
Pore Modification of Anodic Alumina Membrane by Position-Controlled CVD using Catalytic Reaction J.Chem.Eng.Jpn. 32,pp.307-313 (共著)
|
103.
|
1998
|
論文
|
A Kinetic Study of the Chemical Vapor Deposition of Silicon Carbide from Dichlorodimethylsilan Precursors J.Electrochem.Soc. 145(4),pp.1277-1284 (共著)
|
104.
|
1998
|
論文
|
Growth mechanism of PbTiO3 films by metal organic chemical vapor disposition form Pb(DPM)2, Ti(DPM)2(i-OPr)2and O2 J. Mat. Sci. Lett. 17,pp.1653-1655 (共著)
|
105.
|
1998
|
論文
|
The Effects of Gas-Phase Additives NH3, NO, and NO2 on SiH4/O2 Chemical Vapor Deposition J.Electrochem.Soc. 145(3),pp.1070-1075 (共著)
|
106.
|
1997
|
論文
|
Initial growth of chemical-vapor-deposited SiO2 J.Appl.Phys. 82(5),pp.2655-2661 (共著)
|
107.
|
1997
|
論文
|
Kinetic Study of Oxidation of Si(111) Surface using H2O Jpn.J.Appl.Phys. 36,pp.2288-2291 (共著)
|
108.
|
1997
|
論文
|
TEOS/O3 系常圧熱CVDによるSiO2初期成膜過程のAFM・XPSによる観察と形態変化メカニズム 化学工学論文集 第23巻(第5号),644-651頁 (共著)
|
109.
|
1996
|
論文
|
Control of Selective Tungsten Chemical Vapor Deposition by Monolayer Nitridation of Silicon Surface J. Electrochem. Soc. 143,pp.L38-40 (共著)
|
110.
|
1996
|
論文
|
DMSC法を用いたCVDステップカバレッジシミュレーションの高速化 日本機械学論文集(1996) 62-601B,3323-3329頁 (共著)
|
111.
|
1996
|
論文
|
Preparation of CuCl microcrystals-doped SiO2 glass by co-sputtering method Appl. Phys. Lett. 68,pp.1020-1021 (共著)
|
112.
|
1996
|
論文
|
Suppressing the Formation of Cone Structure in Chemical-Vapor-Deposited Aluminum Nitride/Titaniume Nitride Films J. Am. Ceram. Soc. 79,pp.1109-12 (共著)
|
113.
|
1996
|
論文
|
The Effect of Gas-Phase Additives C2H4, C2H6, and C2H2 on SiH4/O2 Chemical Vapor Deposition J. Electrochem. Soc(1996) 143,1355-1361頁 (共著)
|
114.
|
1996
|
論文
|
Using Simultaneous Deposition and Rapid Growth to Produce Nanostructured Composite Films of AlN/TiN by Chemical Vapor Deposition J. Am. Ceram. Soc 79,pp.1335-42 (共著)
|
115.
|
1996
|
論文
|
常圧CVD法によるAlN/TiN複合系製膜反応機構の解析 化学工学論文集 22,1429-1434頁 (共著)
|
116.
|
1996
|
その他
|
レビュー「CVD」4CVDの反応工学 総論 化学工学 60(12),886-887頁 (単著)
|
117.
|
1995
|
論文
|
Control of SiH4/O2 Chemical Vapor Deposition Using the Gas-phase Additive C2H4 Appl. Phys. Lett. 66,pp.2858-2860 (共著)
|
118.
|
1995
|
論文
|
Modeling and Simulation of Blanket Chemical Vapor Deposition of WSix from WF6/Si2H6 Electronics and Communications in Japan Part2,79,pp.83-92 (共著)
|
119.
|
1995
|
論文
|
Monolayer nitridation of silicon surfaces by a dry chemical process using dimethylhydrazine or ammonia Appl. Phys. Lett. 66,pp.1527-9 (共著)
|
120.
|
1995
|
論文
|
Synthesis of GaAs nanoparticles by digital Radio Frequency Sputtering Appl. Phys. Lett. 67,pp.3483-3485 (共著)
|
121.
|
1995
|
論文
|
WF6/Si2H6によるブランケットCVDのモデリングとシミュレーション 電気情報通信学会論文誌 C-II Vol.J78-C-II(No.5),213-220頁 (共著)
|
122.
|
1995
|
論文
|
WSix-CVDプロセスの反応機構 電気情報通信学会論文誌 C-II Vol.J78-C-II(No.5),221-229頁 (共著)
|
123.
|
1995
|
その他
|
研究・技術ハイライト Computer Aided Reaction Design を用いたCVDにおける問題解決へのアプローチ 化学工学 59(9),642-643頁 (共著)
|
124.
|
1994
|
論文
|
Cluster Size Determination in the Chemical Vapor Deposition of Aluminum Nitride -Cluster size Determination from Diffusivity in the Presence of Particles in the Gas Phase- J. Am. Ceram. Soc. 77,pp.2009-16 (共著)
|
125.
|
1994
|
論文
|
Deposition of WSix Films from Preactivated Mixture of WF6/SiH4 Jpn. J. Appl. Phys. 33,pp.275-279 (共著)
|
126.
|
1994
|
論文
|
Step Coverage Simulation for Hexamethyldisiloxane and Ozone Atmospheric Pressure Chemical Vapor Deposition Jpn. J. Appl. Phys. 33,pp.L473-L475 (共著)
|
127.
|
1994
|
論文
|
The effects of UV irradiation on titania deposition from titanium tetra-isopropoxide Applied Surface Science 79/80,pp.389-92 (共著)
|
128.
|
1994
|
その他
|
実践シリーズ「石油化学と触媒」(第7回)触媒の評価 -触媒反応工学入門- ペトロテック 17(10),887-93頁 (共著)
|
129.
|
1993
|
論文
|
Existence of Extinction Temperature in WSix Film Growth from WF6 and SiH4: An Indication of the Role Played by Radical Chain Reactions Appl. Phys. Lett. 62,pp.1606-1608 (共著)
|
130.
|
1993
|
論文
|
Step-Coverage Simulation for Tetraethoxysilane and Ozone Atmospheric Pressure Chemical Vapor Deposition J. Electrochem. Soc. 140,pp.2309-2312 (共著)
|
131.
|
1993
|
論文
|
The Formation Mechanism and Step Coverage Quality of Tetraethylorthosilicate-SiO2 Films Studied by the Micro/Macrocavity Method J. Electrochem. Soc. 140,pp.2952-2959 (共著)
|
132.
|
1993
|
その他
|
CVD法によるナノストラクチャAlN膜合成とそのメカニズム 新素材 4(1),45-49頁 (共著)
|
133.
|
1992
|
論文
|
Composition Change of SiCx (x=1-2) Films Due to Variation of Film Precursors in the Si2H6/C2H2 Chemical Vapor Deposition Reaction System Appl. Phys. Lett. 61,pp.910-912 (共著)
|
134.
|
1992
|
論文
|
Conformal Deposition of WSix Films on Micron-Sized Trenches: The Reactivity of Film Precursors Appl. Phys. Lett. 61,pp.764-765 (共著)
|
135.
|
1992
|
論文
|
Molecular Size and Its Temperature Dependence of Growth Species in Chemical Vapor Deposition of Aluminum Nitride Journal of Chemical Vapor Deposition 1,pp.20-41 (共著)
|
136.
|
1992
|
論文
|
Study of the Reaction of Si2H6 in the Presence of C2H2 in Synthesis of SiC Films by LPCVD Using a Macro/Microcavity Method J. Electrochem. Soc. 139,pp.3652-3659 (共著)
|
137.
|
1992
|
論文
|
常圧熱CVDによるAlN膜合成における配向性の制御 化学工学論文集 18,622-628頁 (共著)
|
138.
|
1992
|
その他
|
CVD成膜種としてのクラスターとその付着確率 -AlCl3とNH3からのCVDによるAlN合成の例- 表面 30(12),1016-21頁 (共著)
|
139.
|
1991
|
論文
|
Mechanism of Step Coverage Formation of SiO2 Films from TEOS and Effects of Gas Phase Additives Studied by Micro/Macrocavity Method J. de Physique IV, Colloque C2, Suppl. au Journal de Physique II 1,pp.C2-55-61 (共著)
|
140.
|
1991
|
論文
|
Micro-Trench 法による APCVD における表面反応速度定数の測定 化学工学論文集 17,1175-1178頁 (共著)
|
141.
|
1991
|
論文
|
Temperature Dependence of the Sticking Probability and Molecular Size of the Film Growth Species in an Atmospheric Chemical Vapor Deposition Process to form AlN from AlCl3 and NH3 Appl. Phys. Lett. 59,pp.2521-2523 (共著)
|
142.
|
1991
|
その他
|
光CVDによるTiO2薄膜の合成 -光CVDのメカニズムを考える- ケミカル エンジニヤリング 36(10),59-62頁 (共著)
|
143.
|
1990
|
論文
|
A Diffusion Barrier Protected Catalyst Applied to NO/CO Reaction Over Ni3N Ind. Eng. Chem. Res. 29,pp.1583-1588 (共著)
|
144.
|
1987
|
論文
|
Spontaneous Nitridation of Ultrafine Particle of Ni during NO/CO Reaction Chem. Lett. 1987,pp.2413-2416 (共著)
|
5件表示
|
全件表示(144件)
|